SAFC Case Study 2

SAFC is a specialty chemical supplier to the semiconductor industry. Its customers are continuously advancing technology that requires molecular tailoring of chemicals to improve compatibility with device fabrication methodologies. Whilst SAFC can synthesise ultra-high purity samples and fully characterise their physical properties the performance of these new precursors in final devices cannot be assessed in-house.

Solution
SAFC partners with a research team who can test its chemicals and provide state-of-the-art feedback on semiconductor device performance from the samples supplied. Liverpool University has such expertise across several departments including Chemistry, Materials Science and Electrical Engineering and is therefore an ideal candidate.

Project
For advanced gas sensors, optoelectronic and semiconductor devices the ability to deposit higher quality CeO2 films has been identified to improve performance and flexibility of final modules. The existing metalorganic precursor [Ce(THD)4] is a low volatility, low reactivity material making it less than ideal in Metalorganic Chemical Vapour Deposition (MOCVD) and the new coating technique of Atomic Layer Deposition (ALD).

An alternative molecule was needed to allow Liverpool to develop a process and SAFC to be able to launch a competitive product offering to the market place. A 1 year project was implemented with a post doc position funded by SAFC. Potential molecules were identified in collaboration with all concerned and fabricated in the Liverpool Chemistry laboratory on small scale and their physical properties assessed at SAFC to ensure thermal stability and volatility of the chemicals were within operational parameters for the ALD process. Larger batches were prepared in the SAFC laboratories and shipped to Liverpool Materials department and growth trials performed. Results from a wide range of parameter sets highlighted the optimum operating range for the new chemicals.

The ability to employ H2O rather than ozone and to achieve reduced carbon contamination in deposited layers was demonstrated by Liverpool and has allowed SAFC to offer a new product specifically for applications where higher quality thin films are beneficial.



Conclusion
Highly successful collaboration to develop new precursor technologies employing the expertise of complementary research teams in an efficient manner to benefit all parties