Large Scale Atomic Force Microscope (AFM): Agilent 5600 LS

The Agilent 5600 LS large scale atomic force microscope (AFM) is the first of its kind in Europe. The active vibration isolation and acoustic enclosure ensures low noise measurements. It has a 100 μm scanner and can accept samples up to 200 × 200 mm. The closed loop control offers active repositioning of the tip and zooming into surface features without piezoelectric drift. The modes available are:

• Contact mode AFM for topography
• Tapping/non-contact mode AFM for topography
• Current sensing AFM for conductivity mapped as a function of topography
• Electric force/Kelvin force Microscopy for electric field/surface potential measurements
• Magnetic force microscopy for mapping magnetic domains as a function of topography
• Scanning microwave microscopy combines AFM with a performance network analyser (PNA). This allows a quantitative measurement of the S11 parameter which can be converted into a capacitance, mapping differences in dielectric constant as a function of topography. This is the first time a PNA has been combined with an AFM.

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